Technical Ceramics
Semiconductor processing
Morgan Technical Ceramics is a global market leader and specialises in supplying materials and components for manufacturing processes of semiconductors and other high quality demanding markets such as LED displays for more than 20 years.
Semiconductor applications
Morgan products are used in fabrication plants all over the world and helping semiconductor manufacturers to optimise their processes, increase production yield and help to reduce their total cost of ownership.
Our semiconductor components are used in applications including:
Deposition
Chamber liners
Edge rings
Gas mixing manifolds
Isolator and shield rings
Lift pads and pins
Plasma tubes
Dry etch
Electrostatic chuck top layers
Focus ring
Showerheads, gas distribution plates
Ion-implant
Shield rings
Lithography
Lamp covers
Plasma tubes and light-source components
Thermal heat sinks
Wafer chucks
MOCVD
Chamber components (e.g. wafer carriers, wafer susceptors)
SiC Single-Crystal Boule Growth
High purity SiC source material
Rapid Thermal Processing (RTP)
Edge rings
Braze alloys
Wafer handling
Charge dissipative end effectors
Wafer inspection
Electrical insulator assemblies
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Semiconductor products
We offer a wide range of products for the Semiconductor Process Equipment (SPE) industry including:
- High-purity alumina chamber and lithography components
- High-purity alumina targets
- CVD SiC chamber and lithography components
- CVD SiC targets
- CVD SiC source material for growing single-crystal boules or ingots
- High-purity alumina, ultra-high surface roughness coating
Semiconductor materials
Our materials offer:
- Plasma resistance
- Low-particle shedding
- High purity
- High temperature dielectric performance
- High Weibuell modulus aluminas
Semiconductor processing ceramics questions
How is ceramic used in semiconductor processing equipment?
Ceramic components provide a clean surface, dimensional stability and resistance to degradation in semiconductor processing equipment such as chamber linings and rings.
Why are ceramics used in semiconductor processing equipment?
Morgan CVD SiC ceramic material has a unique combination of excellent thermal, electrical and chemical properties that makes it well-suited to applications across semiconductor industries where a high-performance material is required.
What are the advantages of Morgan semiconductor products?
- Ultra-pure 99.999% (by GDMS)
- Outstanding corrosion resistance in plasma applications
- Proven durability in high temperature ammonia environments
- Excellent thermal shock resistant
- High thermal conductivity
- Excellent stiffness to weight ratio
- Fine grained microstructure
- Non-porous
- Two resistivity grades
- HR Grade: >10 Ω-cm
- ELR Grade: <0.1 Ω-cm
Why ceramics?
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With our world-class design expertise and specialist manufacturing capabilities we work in partnership with semiconductor Original Equipment Manufacturers (OEMs) to develop competitive solutions to meet the needs of their customers. We have a fully vertically integrated manufacturing process, able to provide low prototype quantities right up to high volume production quantities.
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