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Technical Ceramics

Semiconductor Applications

Morgan products are used in fabrication plants all over the world and helping semiconductor manufacturers to optimise their processes, increase production yield and help to reduce their total cost of ownership.

Our semiconductor components are used in applications including:

Deposition

Chamber liners

Edge rings

Gas mixing manifolds

Isolator and shield rings

Lift pads and pins

Plasma tubes

Dry Etch

Electrostatic chuck (ESC) top layers

Focus ring

Showerheads, gas distribution plates

Ion-implant

Shield rings

Lithography

Lamp covers

Plasma tubes and light-source components

Thermal heat sinks

Wafer chucks

MOCVD

Chamber components (e.g. wafer carriers, wafer susceptors)

 

SiC single-crystal boule growth

High purity SiC source material

Rapid Thermal Processing (RTP)

Edge rings

Braze alloys

Wafer Handling

Charge dissipative end effectors

Wafer Inspection

Electrical insulator assemblies

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Semiconductor Products

We offer a wide range of products for the Semiconductor Process Equipment (SPE) industry including: 

 

 

Semiconductor Materials

Our materials offer:

  • Plasma resistance
  • Low-particle shedding
  • High purity
  • High temperature dielectric performance
  • High Weibuell modulus aluminas

 

 

Why Ceramics?

Chemical properties

Electrical properties

Mechanical properties

Thermal properties

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With our world-class design expertise and specialist manufacturing capabilities we work in partnership with semiconductor Original Equipment Manufacturers (OEMs) to develop competitive solutions to meet the needs of their customers.

We have a fully vertically integrated manufacturing process, that can provide prototypes to high volume production quantities

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