Semiconductor Processing

Morgan Technical Ceramics is at the forefront in the development of materials and components for the demanding environments of semiconductor processing. Its products are installed in fabrication plants all over the world, helping semiconductor manufacturers optimize their processes, maximize yield, and reduce their total cost of ownership.

Our ceramic components and sub-assemblies are used in wafer handling and processing chambers. The dimensional stability, high purity, corrosion resistance and excellent surface integrity of our advanced ceramic materials ensure reliable performance in the harsh environment of the fabrication chamber. Our Silicon Carbide materials help to produce a very high percentage of the silicon wafers made throughout the world that ultimately end up in everyday electronic products.

Semiconductor Processing Materials

With our world-class design expertise and specialist manufacturing capabilities, we work in partnership with semiconductor original equipment manufacturers (OEM’s) to develop competitive solutions to meet the needs of their customers. We produce ceramic components within tight specifications, in quantities from one-offs to very high quality medium-to-high volume production.

Typical materials used:

Typical Applications:

E-chucks
Heater Assemblies
Lift Pins
Wafer Clamps
End Effectors
Paddles
Chamber Rings
Heaters
Sputtering Targets
Pin Chucks
Feed-throughs
Ion Beam Systems
Power Supplies
CMP Pad Conditioners
RTP Edge Rings
Crystal Growth Crucibles
Edge Chamber Components

Download our Semiconductor Brochure from the Literature page in the Related Links on the right hand side of this page.